| 2. | Lead lanthanum titanate ( plt ) ferroelectric thin film has superior pyroelectric , ferroelectric , piezoelectric and photoelectric characteristics , and it has been wildly used for various electromic equipments , such as pyroelectric ir detectors , dynamic random access memories ( drams ) and electrooptic apparatus
采用射频磁控溅射法,分别通过快速退火和传统退火工艺,在5英寸的pt / ti / sio2 / si基片上制得具有不同微结构与性能的plt薄膜。 |
